Precision Engineering: KLA Tencor Building 1 Cleanroom
Description
AlfaTech provided full design services—including architectural, structural, mechanical, process, plumbing, and electrical engineering—for the relocation and transformation of an existing copy center into a high-performance, AMC-compliant Class 100 cleanroom. The project also included the strategic reconfiguration of adjacent office cubicles to safeguard the intellectual property (IP) of the CTO group.
Scope of work encompassed the installation of new HVAC systems to support the cleanroom expansion, AMC filtration systems, and additional fan filter units (FFUs) to ensure ultra-clean air quality. AlfaTech also designed a new process utility trench to accommodate compressed dry air (CDA), nitrogen (N₂), and dedicated chilled water lines. In addition, the project involved the distribution of CDA, N₂, process vacuum (PV), and house vacuum piping to support specialized tools within the cleanroom area.
Highlights
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AMC (Airborne Molecular Contamination) Filtration Systems
Class 100 Cleanroom Design Standards (ISO 5)
Fan Filter Units (FFUs)
Custom HVAC Units for Critical Environments
Utility Trenching for CDA, N₂, PV, and House Vacuum
Dedicated Chilled Water Loop
Process Utility Distribution Systems
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Successful conversion of a standard office space into a fully functional AMC-compliant Class 100 cleanroom
Improved HVAC performance to maintain stringent cleanroom standards
Secure separation and protection of CTO group’s intellectual property through workspace reconfiguration
Enhanced utility infrastructure supporting precision tools and process equipment
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Seamless integration of process and building systems in a constrained existing footprint
Multi-discipline coordination enabling accelerated project delivery
AMC filtration tailored for ultra-sensitive environments to mitigate contamination risk
Modular FFU deployment strategy that supports future cleanroom scalability and upgrades
Strategic cubicle layout planning as a non-intrusive method of IP protection in shared workspaces
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